JPH046898B2 - - Google Patents
Info
- Publication number
- JPH046898B2 JPH046898B2 JP17306482A JP17306482A JPH046898B2 JP H046898 B2 JPH046898 B2 JP H046898B2 JP 17306482 A JP17306482 A JP 17306482A JP 17306482 A JP17306482 A JP 17306482A JP H046898 B2 JPH046898 B2 JP H046898B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- photoelectric
- light receiving
- signal
- foreign object
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000001514 detection method Methods 0.000 claims description 45
- 238000007689 inspection Methods 0.000 claims description 18
- 230000008859 change Effects 0.000 claims description 12
- 230000004044 response Effects 0.000 claims description 6
- 238000012360 testing method Methods 0.000 claims description 5
- 230000005540 biological transmission Effects 0.000 claims description 3
- 238000012937 correction Methods 0.000 claims description 3
- 239000011521 glass Substances 0.000 description 25
- 230000003287 optical effect Effects 0.000 description 24
- 238000010586 diagram Methods 0.000 description 20
- 239000000126 substance Substances 0.000 description 12
- 239000007787 solid Substances 0.000 description 5
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 4
- 230000003321 amplification Effects 0.000 description 4
- 230000008901 benefit Effects 0.000 description 4
- 238000003199 nucleic acid amplification method Methods 0.000 description 4
- 230000009467 reduction Effects 0.000 description 4
- 230000007547 defect Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 235000012431 wafers Nutrition 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 238000007792 addition Methods 0.000 description 1
- 238000000149 argon plasma sintering Methods 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 238000009304 pastoral farming Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 230000008054 signal transmission Effects 0.000 description 1
- 230000007306 turnover Effects 0.000 description 1
- 238000011179 visual inspection Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/94—Investigating contamination, e.g. dust
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57173064A JPS5961762A (ja) | 1982-10-01 | 1982-10-01 | 異物検査装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57173064A JPS5961762A (ja) | 1982-10-01 | 1982-10-01 | 異物検査装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5961762A JPS5961762A (ja) | 1984-04-09 |
| JPH046898B2 true JPH046898B2 (en]) | 1992-02-07 |
Family
ID=15953537
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57173064A Granted JPS5961762A (ja) | 1982-10-01 | 1982-10-01 | 異物検査装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5961762A (en]) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60253222A (ja) * | 1984-05-30 | 1985-12-13 | Hitachi Ltd | 欠陥検査方法 |
| JPS6333834A (ja) * | 1986-07-28 | 1988-02-13 | Canon Inc | 表面状態検査装置 |
| JPS6369244A (ja) * | 1986-09-10 | 1988-03-29 | Hitachi Electronics Eng Co Ltd | ウエハ異物検査装置 |
| JP3099535B2 (ja) * | 1992-07-08 | 2000-10-16 | キヤノン株式会社 | 表面状態検査装置 |
| JP3404274B2 (ja) * | 1997-12-26 | 2003-05-06 | 株式会社日立製作所 | ウエハ検査装置 |
-
1982
- 1982-10-01 JP JP57173064A patent/JPS5961762A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5961762A (ja) | 1984-04-09 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4468120A (en) | Foreign substance inspecting apparatus | |
| US4966457A (en) | Inspecting apparatus for determining presence and location of foreign particles on reticles or pellicles | |
| US4610541A (en) | Foreign substance inspecting apparatus | |
| US6597006B1 (en) | Dual beam symmetric height systems and methods | |
| WO1985003353A1 (en) | Inspection system utilizing dark-field illumination | |
| KR920007196B1 (ko) | 이물질 검출방법 및 그 장치 | |
| CN111638226B (zh) | 检测方法、图像处理器以及检测系统 | |
| CN110658196B (zh) | 一种缺陷检测装置及缺陷检测方法 | |
| US7061598B1 (en) | Darkfield inspection system having photodetector array | |
| JPS6352696B2 (en]) | ||
| JP2002188999A (ja) | 異物・欠陥検出装置及び検出方法 | |
| JPH0256626B2 (en]) | ||
| JPH046898B2 (en]) | ||
| JPH11142127A (ja) | ウェーハ表面検査方法とその装置 | |
| JPH0343581B2 (en]) | ||
| JPS63285449A (ja) | 異物検査装置 | |
| JPH0335617B2 (en]) | ||
| JPS6364738B2 (en]) | ||
| JP3432273B2 (ja) | 異物検査装置及び異物検査方法 | |
| JPS63241343A (ja) | 欠陥検査装置 | |
| JPH06273344A (ja) | 欠陥検査装置および欠陥検査方法 | |
| JPH09210919A (ja) | 欠陥検査方法 | |
| JPH01138447A (ja) | 異物検出方法 | |
| JP2671896B2 (ja) | 異物検査装置 | |
| JPH0547091B2 (en]) |